Effects of low temperature on laser ablation of Si 3 N 4 : Multi‐physics thermal–mechanical simulations and experiments
Fuente:
Wiley Open Access
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| Auteurs principaux: | Xitong Yu, Yukui Cai, Liping Jiang, Qinghua Song, Bing Wang, Zhanqiang Liu |
|---|---|
| Format: | Artículo Open Access |
| Publié: |
Wiley
2026
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