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Bibliographic Details
Main Author: Lakshmi
Format: Recurso digital
Language:English
Published: Zenodo 2025
Online Access:https://doi.org/10.5281/zenodo.15086938
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author Lakshmi
author_facet Lakshmi
contents <p><span>This study presents the development of an efficient and robust MEMS-based vector hydrophone designed for underwater earthquake detection. The proposed hydrophone leverages microelectromechanical systems (MEMS) technology and piezoelectric sensing to achieve high sensitivity, directional detection, and low power consumption. Its compact and scalable design enables deployment in deep-sea environments for real-time seismic monitoring</span><span>.</span><span>The suggested miniature hydrophone is made up of six different sectioned beams with one round proof mass mounted <span> </span>in the center. The hydrophone is made up of a polysilicon substrate at the bottom, a piezoelectric 5H array on the top surface, and a polysilicon circular proof mass. It is designed to work at a resonant frequency of 21 hertz. The suggested device's analysis and simulations are carried out using Comsol Multiphysics, which ensures accurate and dependable results. Simulation results reveal the displacement profile of the hydrophone ranges from 0.28 µm to 28.7 µm and exhibits electric potential between 3 mV to 3 volts with enhanced sensitivity of </span><span>-91dB ref 1v/µPa @ 22 Hz. Simulation Analysis and </span><span><span> </span>validation demonstrates the hydrophone's ability to detect low-frequency seismic signals with high fidelity, proving its potential as an advanced tool for ocean-based earthquake monitoring.</span></p>
format Recurso digital
id zenodo_https___doi_org_10_5281_zenodo_15086938
institution Zenodo
language eng
publishDate 2025
publisher Zenodo
record_format zenodo
spellingShingle An Efficient and Robust MEMS Vector hydrophone for Earthquake detections in Underwater Applications
Lakshmi
<p><span>This study presents the development of an efficient and robust MEMS-based vector hydrophone designed for underwater earthquake detection. The proposed hydrophone leverages microelectromechanical systems (MEMS) technology and piezoelectric sensing to achieve high sensitivity, directional detection, and low power consumption. Its compact and scalable design enables deployment in deep-sea environments for real-time seismic monitoring</span><span>.</span><span>The suggested miniature hydrophone is made up of six different sectioned beams with one round proof mass mounted <span> </span>in the center. The hydrophone is made up of a polysilicon substrate at the bottom, a piezoelectric 5H array on the top surface, and a polysilicon circular proof mass. It is designed to work at a resonant frequency of 21 hertz. The suggested device's analysis and simulations are carried out using Comsol Multiphysics, which ensures accurate and dependable results. Simulation results reveal the displacement profile of the hydrophone ranges from 0.28 µm to 28.7 µm and exhibits electric potential between 3 mV to 3 volts with enhanced sensitivity of </span><span>-91dB ref 1v/µPa @ 22 Hz. Simulation Analysis and </span><span><span> </span>validation demonstrates the hydrophone's ability to detect low-frequency seismic signals with high fidelity, proving its potential as an advanced tool for ocean-based earthquake monitoring.</span></p>
title An Efficient and Robust MEMS Vector hydrophone for Earthquake detections in Underwater Applications
url https://doi.org/10.5281/zenodo.15086938