UNVEILING THE POTENTIAL OF AGENTIC AI: HOW AUTONOMOUS SYSTEMS ARE TRANSFORMING LITHOGRAPHY AND MASKING TECHNIQUES
Fuente:
Zenodo
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Recurso digital |
| Veröffentlicht: |
Zenodo
2025
|
| Online-Zugang: | |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| _version_ | 1866901288887779328 |
|---|---|
| author | Botlagunta Preethish Nanan |
| author_facet | Botlagunta Preethish Nanan |
| contents | <p>..................</p> |
| format | Recurso digital |
| id | zenodo_https___doi_org_10_5281_zenodo_15107563 |
| institution | Zenodo |
| language | |
| publishDate | 2025 |
| publisher | Zenodo |
| record_format | zenodo |
| spellingShingle | UNVEILING THE POTENTIAL OF AGENTIC AI: HOW AUTONOMOUS SYSTEMS ARE TRANSFORMING LITHOGRAPHY AND MASKING TECHNIQUES Botlagunta Preethish Nanan <p>..................</p> |
| title | UNVEILING THE POTENTIAL OF AGENTIC AI: HOW AUTONOMOUS SYSTEMS ARE TRANSFORMING LITHOGRAPHY AND MASKING TECHNIQUES |
| url | https://doi.org/10.5281/zenodo.15107563 |