THE FUTURE OF MASK DESIGN AUTOMATION: CHALLENGES IN MULTI-PATTERNING AND AI'S ROLE IN OVERCOMING SCALING BARRIERS
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| Formato: | Recurso digital |
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2025
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| _version_ | 1866901166581874688 |
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| author | Botlagunta Preethish Nanan |
| author_facet | Botlagunta Preethish Nanan |
| contents | <p>.................</p> |
| format | Recurso digital |
| id | zenodo_https___doi_org_10_5281_zenodo_15107596 |
| institution | Zenodo |
| language | |
| publishDate | 2025 |
| publisher | Zenodo |
| record_format | zenodo |
| spellingShingle | THE FUTURE OF MASK DESIGN AUTOMATION: CHALLENGES IN MULTI-PATTERNING AND AI'S ROLE IN OVERCOMING SCALING BARRIERS Botlagunta Preethish Nanan <p>.................</p> |
| title | THE FUTURE OF MASK DESIGN AUTOMATION: CHALLENGES IN MULTI-PATTERNING AND AI'S ROLE IN OVERCOMING SCALING BARRIERS |
| url | https://doi.org/10.5281/zenodo.15107596 |