USING NICKEL NANOCOMPOSITE AS A STRUCTURAL MATERIAL FOR MEMS RESONATOR FABRICATION
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Zenodo
2003
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| _version_ | 1866901752226250752 |
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| author | Kwok-Siong Teh Yu-Ting Cheng Liwei Lin |
| author_facet | Kwok-Siong Teh Yu-Ting Cheng Liwei Lin |
| contents | |
| format | Recurso digital |
| id | zenodo_https___doi_org_10_5281_zenodo_15416419 |
| institution | Zenodo |
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| publishDate | 2003 |
| publisher | Zenodo |
| record_format | zenodo |
| spellingShingle | USING NICKEL NANOCOMPOSITE AS A STRUCTURAL MATERIAL FOR MEMS RESONATOR FABRICATION Kwok-Siong Teh Yu-Ting Cheng Liwei Lin |
| title | USING NICKEL NANOCOMPOSITE AS A STRUCTURAL MATERIAL FOR MEMS RESONATOR FABRICATION |
| url | https://doi.org/10.5281/zenodo.15416419 |