ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE

Fuente: Zenodo

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Bibliographic Details
Main Authors:	A. Hyo-Soo Lee, B. Hai-Joong Lee, C. Hyuk-Chon Kwon
Format:	Recurso digital
Published:	Zenodo 2011
Online Access:	Acceder al recurso
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