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Main Authors: A. Hyo-Soo Lee, B. Hai-Joong Lee, C. Hyuk-Chon Kwon
Format: Recurso digital
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Published: Zenodo 2011
Online Access:https://doi.org/10.5281/zenodo.15451474
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author A. Hyo-Soo Lee
B. Hai-Joong Lee
C. Hyuk-Chon Kwon
author_facet A. Hyo-Soo Lee
B. Hai-Joong Lee
C. Hyuk-Chon Kwon
contents
format Recurso digital
id zenodo_https___doi_org_10_5281_zenodo_15451474
institution Zenodo
language
publishDate 2011
publisher Zenodo
record_format zenodo
spellingShingle ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE
A. Hyo-Soo Lee
B. Hai-Joong Lee
C. Hyuk-Chon Kwon

title ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE
url https://doi.org/10.5281/zenodo.15451474