ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE
Fuente:
Zenodo
Guardado en:
| Autores principales: | , , |
|---|---|
| Formato: | Recurso digital |
| Publicado: |
Zenodo
2011
|
| Acceso en línea: | |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|
| _version_ | 1866902209686405120 |
|---|---|
| author | A. Hyo-Soo Lee B. Hai-Joong Lee C. Hyuk-Chon Kwon |
| author_facet | A. Hyo-Soo Lee B. Hai-Joong Lee C. Hyuk-Chon Kwon |
| contents | |
| format | Recurso digital |
| id | zenodo_https___doi_org_10_5281_zenodo_15451474 |
| institution | Zenodo |
| language | |
| publishDate | 2011 |
| publisher | Zenodo |
| record_format | zenodo |
| spellingShingle | ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE A. Hyo-Soo Lee B. Hai-Joong Lee C. Hyuk-Chon Kwon |
| title | ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE |
| url | https://doi.org/10.5281/zenodo.15451474 |