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ENHANCEMENT OF ETCHING FACTOR OF COPPER CIRCUIT BY CORRELATING BETWEEN MICROSTRUCTURE AND PATTERN SHAPE

Fuente: Zenodo
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Bibliographic Details
Main Authors: A. Hyo-Soo Lee, B. Hai-Joong Lee, C. Hyuk-Chon Kwon
Format: Recurso digital
Published: Zenodo 2011
Online Access:
Acceder al recurso
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