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| Format: | Recurso digital |
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Zenodo
2025
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| Online Access: | https://doi.org/10.5281/zenodo.17913336 |
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| _version_ | 1866901132426608640 |
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| author | Nesterenko, Iurii |
| author_facet | Nesterenko, Iurii |
| contents | <p>Supplement materials for the submission Atomic layer etching of sputter-deposited AlN<br>thin films in radiofrequency Cl2-Ar plasmas</p> |
| format | Recurso digital |
| id | zenodo_https___doi_org_10_5281_zenodo_17913336 |
| institution | Zenodo |
| language | |
| publishDate | 2025 |
| publisher | Zenodo |
| record_format | zenodo |
| spellingShingle | MD animations (Supplement materials) Nesterenko, Iurii <p>Supplement materials for the submission Atomic layer etching of sputter-deposited AlN<br>thin films in radiofrequency Cl2-Ar plasmas</p> |
| title | MD animations (Supplement materials) |
| url | https://doi.org/10.5281/zenodo.17913336 |