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| Main Authors: | , , , , , , |
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| Format: | Preprint |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/1905.08570 |
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| _version_ | 1866910814253875200 |
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| author | Deng, Shichen Xiao, Chengdi Yuan, Jiale Ma, Dengke Li, Junhui Yang, Nuo He, Hu |
| author_facet | Deng, Shichen Xiao, Chengdi Yuan, Jiale Ma, Dengke Li, Junhui Yang, Nuo He, Hu |
| contents | Silicon Carbide (SiC) is a typical material for third-generation semiconductor. The thermal boundary resistance (TBR) of 4H-SiC/SiO2 interface, was investigated by both experimental measurements and theoretical calculations. The structure of 4H-SiC/SiO2 was characterized by using transmission electron microscopy and X-ray diffraction. The TBR is measured as 8.11*10-8 m2K/W by 3-omega method. Furthermore, the diffuse mismatch model was employed to predict the TBR of different interfaces which is in good agreement with measurements. Heat transport behavior based on phonon scattering perspective was also discussed to understand the variations of TBR across different interfaces. Besides, the intrinsic thermal conductivity of SiO2 thin films (200~1,500 nm in thickness) on 4H-SiC substrates was measured by 3 omega procedure, as 1.42 W/mK at room temperature. It is believed the presented results could provide useful insights on the thermal management and heat dissipation for SiC devices. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_1905_08570 |
| institution | arXiv |
| publishDate | 2019 |
| record_format | arxiv |
| spellingShingle | Thermal Boundary Resistance Measurement and Analysis Across SiC/SiO2 Interface Deng, Shichen Xiao, Chengdi Yuan, Jiale Ma, Dengke Li, Junhui Yang, Nuo He, Hu Applied Physics Mesoscale and Nanoscale Physics Silicon Carbide (SiC) is a typical material for third-generation semiconductor. The thermal boundary resistance (TBR) of 4H-SiC/SiO2 interface, was investigated by both experimental measurements and theoretical calculations. The structure of 4H-SiC/SiO2 was characterized by using transmission electron microscopy and X-ray diffraction. The TBR is measured as 8.11*10-8 m2K/W by 3-omega method. Furthermore, the diffuse mismatch model was employed to predict the TBR of different interfaces which is in good agreement with measurements. Heat transport behavior based on phonon scattering perspective was also discussed to understand the variations of TBR across different interfaces. Besides, the intrinsic thermal conductivity of SiO2 thin films (200~1,500 nm in thickness) on 4H-SiC substrates was measured by 3 omega procedure, as 1.42 W/mK at room temperature. It is believed the presented results could provide useful insights on the thermal management and heat dissipation for SiC devices. |
| title | Thermal Boundary Resistance Measurement and Analysis Across SiC/SiO2 Interface |
| topic | Applied Physics Mesoscale and Nanoscale Physics |
| url | https://arxiv.org/abs/1905.08570 |