APA-Zitierstil (7. Ausg.)

Neul, M., Sprave, I. V., Diebel, L. K., Zinkl, L. G., Fuchs, F., Yamamoto, Y., . . . Schreiber, L. R. (2023). Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K.

Chicago-Zitierstil (17. Ausg.)

Neul, Malte, Isabelle V. Sprave, Laura K. Diebel, Lukas G. Zinkl, Florian Fuchs, Yuji Yamamoto, Christian Vedder, Dominique Bougeard, und Lars R. Schreiber. Local Laser-induced Solid-phase Recrystallization of Phosphorus-implanted Si/SiGe Heterostructures for Contacts Below 4.2 K. 2023.

MLA-Zitierstil (9. Ausg.)

Neul, Malte, et al. Local Laser-induced Solid-phase Recrystallization of Phosphorus-implanted Si/SiGe Heterostructures for Contacts Below 4.2 K. 2023.