Ji, X., Wang, R. N., Liu, Y., Riemensberger, J., Qiu, Z., & Kippenberg, T. J. (2024). Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si$_3$N$_4$ photonic integrated circuits.
Cita Chicago Style (17a ed.)Ji, Xinru, Rui Ning Wang, Yang Liu, Johann Riemensberger, Zheru Qiu, y Tobias J. Kippenberg. Foundry Compatible, Efficient Wafer-scale Manufacturing of Ultra-low Loss, High-density Si$_3$N$_4$ Photonic Integrated Circuits. 2024.
Cita MLA (9a ed.)Ji, Xinru, et al. Foundry Compatible, Efficient Wafer-scale Manufacturing of Ultra-low Loss, High-density Si$_3$N$_4$ Photonic Integrated Circuits. 2024.
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