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Auteurs principaux: Reato, Eros, Esteki, Ardeshir, Ku, Benny, Wang, Zhenxing, Heuken, Michael, Lemme, Max C., Engström, Olof
Format: Preprint
Publié: 2024
Sujets:
Accès en ligne:https://arxiv.org/abs/2407.07783
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author Reato, Eros
Esteki, Ardeshir
Ku, Benny
Wang, Zhenxing
Heuken, Michael
Lemme, Max C.
Engström, Olof
author_facet Reato, Eros
Esteki, Ardeshir
Ku, Benny
Wang, Zhenxing
Heuken, Michael
Lemme, Max C.
Engström, Olof
contents A method for assessing the quality of electronic material properties of thin-film metal oxide semiconductor field-effect transistors (MOSFETs) is presented. By investigating samples with MOCVD-grown MoS${_2}$ channels exposed to atmospheric conditions, the existence of electron traps in MoS${_2}$ and at the interface between the gate insulator and the thin-film MoS${_2}$ are revealed. Differential conductance and capacitance data of the transistor channels are plotted as 3D surfaces on a base plane spanned by the measurement frequency versus the gate voltage. The existence of defects is confirmed by comparison with ideal results from a theoretical model.
format Preprint
id arxiv_https___arxiv_org_abs_2407_07783
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Multiparameter admittance spectroscopy for investigating defects in MoS${_2}$ thin film MOSFETs
Reato, Eros
Esteki, Ardeshir
Ku, Benny
Wang, Zhenxing
Heuken, Michael
Lemme, Max C.
Engström, Olof
Applied Physics
A method for assessing the quality of electronic material properties of thin-film metal oxide semiconductor field-effect transistors (MOSFETs) is presented. By investigating samples with MOCVD-grown MoS${_2}$ channels exposed to atmospheric conditions, the existence of electron traps in MoS${_2}$ and at the interface between the gate insulator and the thin-film MoS${_2}$ are revealed. Differential conductance and capacitance data of the transistor channels are plotted as 3D surfaces on a base plane spanned by the measurement frequency versus the gate voltage. The existence of defects is confirmed by comparison with ideal results from a theoretical model.
title Multiparameter admittance spectroscopy for investigating defects in MoS${_2}$ thin film MOSFETs
topic Applied Physics
url https://arxiv.org/abs/2407.07783