Singer, M., Schoof, B., Gupta, H., Zahn, D., Weber, J., & Tornow, M. (2024). Tantalum thin films sputtered on silicon and on different seed layers: Material characterization and coplanar waveguide resonator performance.
Chicago-Zitierstil (17. Ausg.)Singer, Moritz, Benedikt Schoof, Harsh Gupta, Daniela Zahn, Johannes Weber, und Marc Tornow. Tantalum Thin Films Sputtered on Silicon and on Different Seed Layers: Material Characterization and Coplanar Waveguide Resonator Performance. 2024.
MLA-Zitierstil (9. Ausg.)Singer, Moritz, et al. Tantalum Thin Films Sputtered on Silicon and on Different Seed Layers: Material Characterization and Coplanar Waveguide Resonator Performance. 2024.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.