APA (7th ed.) Citation

Pamarty, A. P., Neuweiler, R., Do, L. Q., Johnson, K., Sanchez, J. J., & Koli, D. (2024). Data-driven surrogate model for etch rate profiles using sensor data from a reactive ion etcher.

Chicago Style (17th ed.) Citation

Pamarty, Abhijit Pranav, Robert Neuweiler, Le Quyen Do, Keaton Johnson, James J. Sanchez, and Dinesh Koli. Data-driven Surrogate Model for Etch Rate Profiles Using Sensor Data from a Reactive Ion Etcher. 2024.

MLA (9th ed.) Citation

Pamarty, Abhijit Pranav, et al. Data-driven Surrogate Model for Etch Rate Profiles Using Sensor Data from a Reactive Ion Etcher. 2024.