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Main Authors: Wu, Heng, Lu, Haoran, Peng, Wanyue, Xu, Ziqiao, Chu, Yanbang, Sun, Jiacheng, Zhou, Falong, Wu, Jack, Zhang, Lijie, Bu, Weihai, Kang, Jin, Li, Ming, Lin, Yibo, Wang, Runsheng, Zhang, Xin, Huang, Ru
Format: Preprint
Published: 2024
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Online Access:https://arxiv.org/abs/2411.00309
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author Wu, Heng
Lu, Haoran
Peng, Wanyue
Xu, Ziqiao
Chu, Yanbang
Sun, Jiacheng
Zhou, Falong
Wu, Jack
Zhang, Lijie
Bu, Weihai
Kang, Jin
Li, Ming
Lin, Yibo
Wang, Runsheng
Zhang, Xin
Huang, Ru
author_facet Wu, Heng
Lu, Haoran
Peng, Wanyue
Xu, Ziqiao
Chu, Yanbang
Sun, Jiacheng
Zhou, Falong
Wu, Jack
Zhang, Lijie
Bu, Weihai
Kang, Jin
Li, Ming
Lin, Yibo
Wang, Runsheng
Zhang, Xin
Huang, Ru
contents In this work, we proposed a new 3D integration technology: the Flip 3D integration (F3D), consisting of the 3D transistor stacking, the 3D dual-sided interconnects, the 3D die-to-die stacking and the dual-sided Monolithic 3D (M3D). Based on a 32-bit FFET RISCV core, besides the scaling benefits of the Flip FET (FFET), the dual-sided signal routing shows even more routing flexibility with 6.8% area reduction and 5.9% EDP improvement. Novel concepts of Multi-Flipping processes (Double Flips and Triple Flips) were proposed to relax the thermal budget constraints in the F3D and thus support the dual-sided M3D in the F3D. The core's EDP and frequency are improved by up to 3.2% and 2.3% respectively, after BEOL optimizations based on the Triple Flips compared with unoptimized ones.
format Preprint
id arxiv_https___arxiv_org_abs_2411_00309
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle From Flip FET to Flip 3D Integration (F3D): Maximizing the Scaling Potential of Wafer Both Sides Beyond Conventional 3D Integration
Wu, Heng
Lu, Haoran
Peng, Wanyue
Xu, Ziqiao
Chu, Yanbang
Sun, Jiacheng
Zhou, Falong
Wu, Jack
Zhang, Lijie
Bu, Weihai
Kang, Jin
Li, Ming
Lin, Yibo
Wang, Runsheng
Zhang, Xin
Huang, Ru
Mesoscale and Nanoscale Physics
In this work, we proposed a new 3D integration technology: the Flip 3D integration (F3D), consisting of the 3D transistor stacking, the 3D dual-sided interconnects, the 3D die-to-die stacking and the dual-sided Monolithic 3D (M3D). Based on a 32-bit FFET RISCV core, besides the scaling benefits of the Flip FET (FFET), the dual-sided signal routing shows even more routing flexibility with 6.8% area reduction and 5.9% EDP improvement. Novel concepts of Multi-Flipping processes (Double Flips and Triple Flips) were proposed to relax the thermal budget constraints in the F3D and thus support the dual-sided M3D in the F3D. The core's EDP and frequency are improved by up to 3.2% and 2.3% respectively, after BEOL optimizations based on the Triple Flips compared with unoptimized ones.
title From Flip FET to Flip 3D Integration (F3D): Maximizing the Scaling Potential of Wafer Both Sides Beyond Conventional 3D Integration
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2411.00309