Zhang, L., Guo, Y., Wang, J., Li, J., & Yan, J. (2025). 3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire toward Ultra-wideband Photonics Integrated Circuits.
Cita Chicago Style (17a ed.)Zhang, Liang, Yanan Guo, Junxi Wang, Jinmin Li, y Jianchang Yan. 3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire Toward Ultra-wideband Photonics Integrated Circuits. 2025.
Cita MLA (9a ed.)Zhang, Liang, et al. 3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire Toward Ultra-wideband Photonics Integrated Circuits. 2025.
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