Guo, Q., Xu, Z., Yang, L., Zhang, J., Gan, Y., Zhang, J., . . . Wang, Y. (2025). Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists.
Chicago-Zitierstil (17. Ausg.)Guo, Qinhua, Zhiqing Xu, Lizhou Yang, Jingyang Zhang, Yawen Gan, Jiajun Zhang, Jiahao Jiang, und Yunda Wang. Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists. 2025.
MLA-Zitierstil (9. Ausg.)Guo, Qinhua, et al. Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists. 2025.