Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Preprint |
| Published: |
2025
|
| Subjects: | |
| Online Access: | https://arxiv.org/abs/2504.15078 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1866917300915929088 |
|---|---|
| author | Guo, Qinhua Xu, Zhiqing Yang, Lizhou Zhang, Jingyang Gan, Yawen Zhang, Jiajun Jiang, Jiahao Wang, Yunda |
| author_facet | Guo, Qinhua Xu, Zhiqing Yang, Lizhou Zhang, Jingyang Gan, Yawen Zhang, Jiajun Jiang, Jiahao Wang, Yunda |
| contents | Photolithography conventionally requires flat, rigid and stable substrates, limiting its applications in flexible, curved, and transient electronics. In this study, a breakthrough approach is reported that employs a reversibly adhesion-switchable phase-changing polymer to universally transfer commercial photoresists onto previously inaccessible substrates, overcoming fundamental limitations of conventional photolithography. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2504_15078 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists Guo, Qinhua Xu, Zhiqing Yang, Lizhou Zhang, Jingyang Gan, Yawen Zhang, Jiajun Jiang, Jiahao Wang, Yunda Applied Physics Photolithography conventionally requires flat, rigid and stable substrates, limiting its applications in flexible, curved, and transient electronics. In this study, a breakthrough approach is reported that employs a reversibly adhesion-switchable phase-changing polymer to universally transfer commercial photoresists onto previously inaccessible substrates, overcoming fundamental limitations of conventional photolithography. |
| title | Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2504.15078 |