Galleni, L., Singh, D. P., Conard, T., Pourtois, G., van der Heide, P., Petersen, J., . . . van Setten, M. J. (2025). Unraveling the Reaction Mechanisms in a Chemically Amplified EUV Photoresist from a Combined Theoretical and Experimental Approach.
Cita Chicago Style (17a ed.)Galleni, Laura, Dhirendra P. Singh, Thierry Conard, Geoffrey Pourtois, Paul van der Heide, John Petersen, Kevin M. Dorney, y Michiel J. van Setten. Unraveling the Reaction Mechanisms in a Chemically Amplified EUV Photoresist from a Combined Theoretical and Experimental Approach. 2025.
Cita MLA (9a ed.)Galleni, Laura, et al. Unraveling the Reaction Mechanisms in a Chemically Amplified EUV Photoresist from a Combined Theoretical and Experimental Approach. 2025.
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