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Main Authors: Peng, Zhenghan, Uthman, Adeyemi, Zhang, Zhepeng, Hoang, Anh Tuan, Zhu, Xiang, Pop, Eric, Mannix, Andrew J.
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2506.18342
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author Peng, Zhenghan
Uthman, Adeyemi
Zhang, Zhepeng
Hoang, Anh Tuan
Zhu, Xiang
Pop, Eric
Mannix, Andrew J.
author_facet Peng, Zhenghan
Uthman, Adeyemi
Zhang, Zhepeng
Hoang, Anh Tuan
Zhu, Xiang
Pop, Eric
Mannix, Andrew J.
contents Electronic and optoelectronic applications of two-dimensional (2D) semiconductors demand precise control over material quality, including thickness, composition, doping, and defect density. Conventional benchmarking methods (e.g., charge transport, confocal mapping, electron or scanning probe microscopy) are slow, perturb sample quality, or involve trade-offs between speed, resolution, and scan area. To accelerate assessment of 2D semiconductors, we demonstrate a broadband, wide-field hyperspectral optical microscope for 2D materials (2D-HOM) that rapidly captures a spatial-spectral data cube within seconds. The data cube includes x-y spatial coordinate (a 300 * 300 $μ\mathrm{m}^2$ field, with ~ 1 $μ\mathrm{m}$ resolution) and a selectable wavelength range between 1100 to 200 nm at each pixel. Using synthesized films and heterostructures of transition metal dichalcogenides ($\mathrm{MoS}_{2}$, $\mathrm{WS}_{2}$, $\mathrm{V}_{x}\mathrm{W}_{1-x}\mathrm{S}_{2}$, and $\mathrm{WSe}_{2}$), we show that this cost-effective technique detects spectral fingerprints of material identity, doping, grain boundaries, and alloy composition, and enables advanced analysis, including unsupervised machine learning for spatial segmentation.
format Preprint
id arxiv_https___arxiv_org_abs_2506_18342
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Wide-field Hyperspectral Optical Microscopy for Rapid Characterization of Two-Dimensional Semiconductors and Heterostructures
Peng, Zhenghan
Uthman, Adeyemi
Zhang, Zhepeng
Hoang, Anh Tuan
Zhu, Xiang
Pop, Eric
Mannix, Andrew J.
Materials Science
Electronic and optoelectronic applications of two-dimensional (2D) semiconductors demand precise control over material quality, including thickness, composition, doping, and defect density. Conventional benchmarking methods (e.g., charge transport, confocal mapping, electron or scanning probe microscopy) are slow, perturb sample quality, or involve trade-offs between speed, resolution, and scan area. To accelerate assessment of 2D semiconductors, we demonstrate a broadband, wide-field hyperspectral optical microscope for 2D materials (2D-HOM) that rapidly captures a spatial-spectral data cube within seconds. The data cube includes x-y spatial coordinate (a 300 * 300 $μ\mathrm{m}^2$ field, with ~ 1 $μ\mathrm{m}$ resolution) and a selectable wavelength range between 1100 to 200 nm at each pixel. Using synthesized films and heterostructures of transition metal dichalcogenides ($\mathrm{MoS}_{2}$, $\mathrm{WS}_{2}$, $\mathrm{V}_{x}\mathrm{W}_{1-x}\mathrm{S}_{2}$, and $\mathrm{WSe}_{2}$), we show that this cost-effective technique detects spectral fingerprints of material identity, doping, grain boundaries, and alloy composition, and enables advanced analysis, including unsupervised machine learning for spatial segmentation.
title Wide-field Hyperspectral Optical Microscopy for Rapid Characterization of Two-Dimensional Semiconductors and Heterostructures
topic Materials Science
url https://arxiv.org/abs/2506.18342