APA (7th ed.) Citation

Shen, Y., Song, S., Chen, T., Zhang, K., Chen, Y., Zhao, L., & Jiang, P. (2025). Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation.

Chicago Style (17th ed.) Citation

Shen, Yang, Shangzhi Song, Tao Chen, Kexin Zhang, Yu Chen, Lu Zhao, and Puqing Jiang. Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation. 2025.

MLA (9th ed.) Citation

Shen, Yang, et al. Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation. 2025.