Fonari, A., Elliott, S. D., Brock, C. N., Li, Y., Gavartin, J., & Halls, M. D. (2025). Finding the temperature window for atomic layer deposition of ruthenium metal via efficient phonon calculations.
Chicago Style (17th ed.) CitationFonari, Alexandr, Simon D. Elliott, Casey N. Brock, Yan Li, Jacob Gavartin, and Mathew D. Halls. Finding the Temperature Window for Atomic Layer Deposition of Ruthenium Metal via Efficient Phonon Calculations. 2025.
MLA (9th ed.) CitationFonari, Alexandr, et al. Finding the Temperature Window for Atomic Layer Deposition of Ruthenium Metal via Efficient Phonon Calculations. 2025.
Warning: These citations may not always be 100% accurate.