Fonari, A., Elliott, S. D., Brock, C. N., Li, Y., Gavartin, J., & Halls, M. D. (2025). Finding the temperature window for atomic layer deposition of ruthenium metal via efficient phonon calculations.
Citazione stile Chigago Style (17a edizione)Fonari, Alexandr, Simon D. Elliott, Casey N. Brock, Yan Li, Jacob Gavartin, e Mathew D. Halls. Finding the Temperature Window for Atomic Layer Deposition of Ruthenium Metal via Efficient Phonon Calculations. 2025.
Citatione MLA (9a ed.)Fonari, Alexandr, et al. Finding the Temperature Window for Atomic Layer Deposition of Ruthenium Metal via Efficient Phonon Calculations. 2025.
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