APA (7th ed.) Citation

Tao, Z., Liu, F., Jin, Y., Xu, K., Sun, M., Hu, X., . . . Wang, H. (2025). Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography.

Chicago Style (17th ed.) Citation

Tao, Ze, Fujun Liu, Yuxi Jin, Ke Xu, Minghui Sun, Xiangsheng Hu, Qi Cao, Haoran Xu, and Hanxuan Wang. Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography. 2025.

MLA (9th ed.) Citation

Tao, Ze, et al. Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography. 2025.