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Bibliographic Details
Main Authors: Fonck, Valentin, Razeghi, Mohammadali, Spièce, Jean, Dobson, Phillip, Weaver, Jonathan, Ridgard, George, Noah, Grayson M., Gehring, Pascal
Format: Preprint
Published: 2025
Subjects:
Online Access:https://arxiv.org/abs/2510.27529
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author Fonck, Valentin
Razeghi, Mohammadali
Spièce, Jean
Dobson, Phillip
Weaver, Jonathan
Ridgard, George
Noah, Grayson M.
Gehring, Pascal
author_facet Fonck, Valentin
Razeghi, Mohammadali
Spièce, Jean
Dobson, Phillip
Weaver, Jonathan
Ridgard, George
Noah, Grayson M.
Gehring, Pascal
contents Efficient thermal management is critical for cryogenic CMOS circuits, where local heating can compromise device performance and qubit coherence. Understanding heat flow at the nanoscale in these multilayer architectures requires localized, high-resolution thermal probing techniques capable of accessing buried structures. Here, we introduce a sideband thermal wave detection scheme for Scanning Thermal Microscopy, S-STWM, to probe deeply buried heater structures within CMOS dies. By extracting the phase of propagating thermal waves, this method provides spatially resolved insight into heat dissipation pathways through complex multilayer structures. Our approach enables quantitative evaluation of thermal management strategies, informs the design of cryo-CMOS circuits, and establishes a foundation for in situ thermal characterization under cryogenic operating conditions.
format Preprint
id arxiv_https___arxiv_org_abs_2510_27529
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Characterization of heat transfer in 3D CMOS structures using Sideband Scanning Thermal Wave Microscopy
Fonck, Valentin
Razeghi, Mohammadali
Spièce, Jean
Dobson, Phillip
Weaver, Jonathan
Ridgard, George
Noah, Grayson M.
Gehring, Pascal
Other Condensed Matter
Efficient thermal management is critical for cryogenic CMOS circuits, where local heating can compromise device performance and qubit coherence. Understanding heat flow at the nanoscale in these multilayer architectures requires localized, high-resolution thermal probing techniques capable of accessing buried structures. Here, we introduce a sideband thermal wave detection scheme for Scanning Thermal Microscopy, S-STWM, to probe deeply buried heater structures within CMOS dies. By extracting the phase of propagating thermal waves, this method provides spatially resolved insight into heat dissipation pathways through complex multilayer structures. Our approach enables quantitative evaluation of thermal management strategies, informs the design of cryo-CMOS circuits, and establishes a foundation for in situ thermal characterization under cryogenic operating conditions.
title Characterization of heat transfer in 3D CMOS structures using Sideband Scanning Thermal Wave Microscopy
topic Other Condensed Matter
url https://arxiv.org/abs/2510.27529