Nayak, S., Nallagatla, V. R., Bisht, R. S., Solonenko, D., Henzen, D., Ali, W. R., . . . De Pastina, A. (2025). Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering.
Chicago Style (17th ed.) CitationNayak, Sanjay, et al. Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering. 2025.
MLA (9th ed.) CitationNayak, Sanjay, et al. Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering. 2025.
Warning: These citations may not always be 100% accurate.