Cita APA (7a ed.)

Nayak, S., Nallagatla, V. R., Bisht, R. S., Solonenko, D., Henzen, D., Ali, W. R., . . . De Pastina, A. (2025). Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering.

Cita Chicago Style (17a ed.)

Nayak, Sanjay, et al. Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering. 2025.

Cita MLA (9a ed.)

Nayak, Sanjay, et al. Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering. 2025.