The effect of surface quenching coefficients of $O_2(a^{1}Δg)$ and $O_2(b^{1}Σg^{+})$ on capacitively coupled $Ar$/$O_2$ discharge: A global/equivalent circuit model study
Fuente:
arXiv
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| Main Authors: | , , , |
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| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | |
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