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| Main Authors: | , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2601.17048 |
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| _version_ | 1866915752440758272 |
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| author | Tan, Jing Jie Schreiner, Rupert Hausladen, Matthias Asgharzade, Ali Edler, Simon Bartsch, Julian Bachmann, Michael Schels, Andreas Kwan, Ban-Hoe Ng, Danny Wee-Kiat Hum, Yan-Chai |
| author_facet | Tan, Jing Jie Schreiner, Rupert Hausladen, Matthias Asgharzade, Ali Edler, Simon Bartsch, Julian Bachmann, Michael Schels, Andreas Kwan, Ban-Hoe Ng, Danny Wee-Kiat Hum, Yan-Chai |
| contents | Accurate characterization of silicon microstructures is essential for advancing microscale fabrication, quality control, and device performance. Traditional analysis using Scanning Electron Microscopy (SEM) often requires labor-intensive, manual evaluation of feature geometry, limiting throughput and reproducibility. In this study, we propose SiMiC: Context-Aware Silicon Microstructure Characterization Using Attention-Based Convolutional Neural Networks for Field-Emission Tip Analysis. By leveraging deep learning, our approach efficiently extracts morphological features-such as size, shape, and apex curvature-from SEM images, significantly reducing human intervention while improving measurement consistency. A specialized dataset of silicon-based field-emitter tips was developed, and a customized CNN architecture incorporating attention mechanisms was trained for multi-class microstructure classification and dimensional prediction. Comparative analysis with classical image processing techniques demonstrates that SiMiC achieves high accuracy while maintaining interpretability. The proposed framework establishes a foundation for data-driven microstructure analysis directly linked to field-emission performance, opening avenues for correlating emitter geometry with emission behavior and guiding the design of optimized cold-cathode and SEM electron sources. The related dataset and algorithm repository that could serve as a baseline in this area can be found at https://research.jingjietan.com/?q=SIMIC |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2601_17048 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | SiMiC: Context-Aware Silicon Microstructure Characterization Using Attention-Based Convolutional Neural Networks for Field-Emission Tip Analysis Tan, Jing Jie Schreiner, Rupert Hausladen, Matthias Asgharzade, Ali Edler, Simon Bartsch, Julian Bachmann, Michael Schels, Andreas Kwan, Ban-Hoe Ng, Danny Wee-Kiat Hum, Yan-Chai Computer Vision and Pattern Recognition Artificial Intelligence Accurate characterization of silicon microstructures is essential for advancing microscale fabrication, quality control, and device performance. Traditional analysis using Scanning Electron Microscopy (SEM) often requires labor-intensive, manual evaluation of feature geometry, limiting throughput and reproducibility. In this study, we propose SiMiC: Context-Aware Silicon Microstructure Characterization Using Attention-Based Convolutional Neural Networks for Field-Emission Tip Analysis. By leveraging deep learning, our approach efficiently extracts morphological features-such as size, shape, and apex curvature-from SEM images, significantly reducing human intervention while improving measurement consistency. A specialized dataset of silicon-based field-emitter tips was developed, and a customized CNN architecture incorporating attention mechanisms was trained for multi-class microstructure classification and dimensional prediction. Comparative analysis with classical image processing techniques demonstrates that SiMiC achieves high accuracy while maintaining interpretability. The proposed framework establishes a foundation for data-driven microstructure analysis directly linked to field-emission performance, opening avenues for correlating emitter geometry with emission behavior and guiding the design of optimized cold-cathode and SEM electron sources. The related dataset and algorithm repository that could serve as a baseline in this area can be found at https://research.jingjietan.com/?q=SIMIC |
| title | SiMiC: Context-Aware Silicon Microstructure Characterization Using Attention-Based Convolutional Neural Networks for Field-Emission Tip Analysis |
| topic | Computer Vision and Pattern Recognition Artificial Intelligence |
| url | https://arxiv.org/abs/2601.17048 |