Mukhopadhyay, S., Yang, K., Vasudevan, K. T., Divvela, M. J., Dogru, S., Krishnamurthy, D., . . . Singh, V. (2026). Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient.
Cita Chicago Style (17a ed.)Mukhopadhyay, Saumyadip, et al. Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient. 2026.
Cita MLA (9a ed.)Mukhopadhyay, Saumyadip, et al. Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient. 2026.
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