Isometsä, J., Bieleviciute, A., Liu, X., Vähänissi, V., & Savin, H. (2026). Nanostructuring SiC by sequential plasma oxidation and reactive ion etching.
Cita Chicago Style (17a ed.)Isometsä, Joonas, Auguste Bieleviciute, Xiaolong Liu, Ville Vähänissi, y Hele Savin. Nanostructuring SiC by Sequential Plasma Oxidation and Reactive Ion Etching. 2026.
Cita MLA (9a ed.)Isometsä, Joonas, et al. Nanostructuring SiC by Sequential Plasma Oxidation and Reactive Ion Etching. 2026.
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