Bhatia, E., Du, Y., Koirala, K. P., Kow, C., Liu, M., Macy, J., . . . Xiao, Z. (2026). Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes.
Chicago Style (17th ed.) CitationBhatia, Ekta, et al. Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 Mm Scale Processes. 2026.
MLA (9th ed.) CitationBhatia, Ekta, et al. Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 Mm Scale Processes. 2026.
Warning: These citations may not always be 100% accurate.