Lai, Y., Xiong, X., Xue, Z., Chen, G., Wang, J., Liu, X., . . . Luo, P. (2026). LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching.
Chicago Style (17th ed.) CitationLai, Yao, et al. LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching. 2026.
MLA (9th ed.) CitationLai, Yao, et al. LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching. 2026.
Warning: These citations may not always be 100% accurate.