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Bibliographic Details
Main Author: I. C. Oliveira
Format: Artículo científico
Language:en
Published: Sociedade Brasileira de Física 2006
Subjects:
Física, Astronomía y Matemáticas
XRD amd AFM
AlN thin films
Hollow cathode magnetron deposition
Online Access:https://www.redalyc.org/articulo.oa?id=46436326
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https://www.redalyc.org/articulo.oa?id=46436326

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